Easy to use and very useful for quick and precise SEM, FESEM, FIB, CD-SEM, LM, and AFM magnification calibration.

Unique, economically priced, yet fully featured and traceable calibration standards for a wide measurement range. They are made using the latest semiconductor and MEMS manufacturing techniques.

The Pelcotec™ CDMS Calibration Standard is available with two features size ranges, which are both offered as traceable and certified standards, making a total of 4 versions:

• Pelcotec™ CDMS-1T
  Fully traceable with features from 2.0mm to 1um for a magnification range from 10x - 20,000x; ideal for desk top SEMs and low to medium magnification applications
  Representative CDMS-1T Traceable Certificate
   
• Pelcotec™ CDMS -0.1T
  Fully traceable with features from 2.0mm to 100nm for a magnification range up to 10 - 200,000x; for all SEM and most FESEM applications
   Representative CDMS-0.1T Traceable Certificate
   
• Pelcotec™ CDMS-1C
  Individually certified against a NIST standard with features from 2.0mm to 1µm for a magnification range from 10x - 20,000x; ideal for desk top SEMs and low to medium magnification applications
   Representative CDMS-1C Conformance Certificate
   
• Pelcotec™ CDMS-0.1C
  Individually certified against a NIST standard with features from 2.0mm to 100nm for a magnification range up to 10 - 200,000x; for all SEM and most FESEM applications
  Representative CDMS-0.1C Conformance Certificate

The Pelcotec™ CDMS Critical Dimensions and Magnification Standards are made on an ultra flat silicon substrate with a precise 50nm chromium deposition for the features up to 5µm and a combination of 50nm gold over 20nm chromium for the features sizes from 2µm to 100nm.

The Cr and Au/Cr on Si provides excellent contrast both in SE and BSE imaging mode. The features are easier to determine than on etched Si standards. Since the silicon substrate, the chromium and the chromium/gold features are all conductive there are no charging issues with this calibration standard.

Due to its sturdy construction the CDMS standard can be cleaned using a plasma cleaner. The smaller features are nested for easy navigation and quick calibration. The accuracy of the features is 0.3% or better. The actual size of the standard is 2.5 x 2.5mm with a thickness of 675µm ±25µm. There is no coating on the Si surface.

Each Pelcotec™ CDMS calibration standard has a unique identification number. They are available either unmounted or mounted on SEM holders A-R. For AFM applications the Pelcotec™ CDMS is mounted on a 12mm AFM disc, for LM applications it is mounted on a 25 x 75mm glass slide. The specimen may also be prepared on a custom mount of your choice.

Store the Pelcotec™ CDMS Calibration Standard in a vacuum desiccator such as the PELCO® SEM Sample Stub Vacuum Desiccator.

Pelcotec™ CDMS Comparison Table

Pelcotec™ Technical Notes for CDMS - Critical Dimension Magnification Standards