Description
Test Grating for Lateral Calibration
The TG3D-3000/600 test grating with its 3-Dimensional array is intended for lateral calibration of SPM scanners, detection of lateral nonlinearity, hysteresis, creep, cross-coupling effects and for determination of the tip aspect ratio.
| Structure: | Si wafer with grating in top surface | 
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| Pattern type: | Chessboard like array of square pillars with sharp undercut edges |
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| Height: | 0.3 – 0.6 µm | |
| Top square size | 1.2 x 1.2 µm | |
| Edge radius: | ≤10nm | |
| Period: | 3 ±0.05 µm | |
| Chip size: | 5 x 5 x 0.5mm | |
| Effective area: | Central square of 3 x 3mm | |
Note: The precision on the height is based on the measurement of 5 gratings (randomly selected from a batch of 300 gratings) by an SPM calibrated by a PTB certified TGZ-20 grating.
The basic step height can vary from the specified one within 10% (example: step height can be 22 1.5nm).
