Description
Triangular Test Grating for X- or Y-axis
The TGT-1500 test grating is intended for SPM calibration in X- or Y-axis, determination of lateral and vertical scanner nonlinearity, detection of angular distortion and tip characterization.
Nominal values for height and pitch are given below. Actual values come with the test grating.
| Structure: | Si wafer with grating in top surface |  |
| Pattern type: | 1-D array of triangular steps with precise linear and angular dimensions |
|
| Edge angle: | approximately 70 degrees | |
| Edge Radius: | ?10nm | |
| Pattern Height: | 1.8 m – non-calibrated, for information only | |
| Pitch: | 3 ±0.01 µm | |
| Chip size: | 5 x 5 x 0.5mm | |
| Effective area: | Central square of 3 x 3mm |
