Description
Block Test Gratings for Z-axis
Selection of 3 block type test gratings with different step heights intended for Z-axis calibration of scanning probe microscopes and linearity measurements.
| Structure: | Si Wafer with SiO2 layer for grating |  |
| Pattern type: | 1-Dimensional (in Z-axis direction) | |
| Step heights: | 20 1.5nm for TGZ-20 110 2nm for TGZ-100 520 3nm for TGZ-500 |
|
| Period: | 3 ±0.01 µm | |
| Chip size: | 5 x 5 x 0.5mm | |
| Effective area: | Central square of 3 x 3mm |
Note: Values for step heights are nominal; actual step height is given with the product and could be 5%
