Description
Test Grating for Tip Sharpness
The TGTZ-400 test grating is intended for 3-D visualization of the scanning tip, determination of tip sharpness parameters, tip degradation and contamination control.
| Structure: | Si wafer with grating in top surface |  |
| Pattern type: | Array of sharp tips | |
| Tip angle: | About 50 degrees | |
| Tip height: | 0.3 – 0.7 µm | |
| Period: | 3 ±0.01 µm | |
| Diagonal period: | 2.12 µm | |
| Chip size: | 5 x 5 x 0.5mm | |
| Effective area: | Central square of 2 x 2mm |
