Triangular Test Grating for X- or Y-axis
The TGT-1500 test grating is intended for SPM calibration in X- or Y-axis, determination of lateral and vertical scanner nonlinearity, detection of angular distortion and tip characterization.
Nominal values for height and pitch are given below. Actual values come with the test grating.
| Structure: | Si wafer with grating in top surface |  |
| Pattern type: | 1-D array of triangular steps with precise linear and angular dimensions | |
| Edge angle: | approximately 70 degrees | |
| Edge Radius: | ?10nm | |
| Pattern Height: | 1.8 m – non-calibrated, for information only | |
| Pitch: | 3 ±0.01 µm | |
| Chip size: | 5 x 5 x 0.5mm | |
| Effective area: | Central square of 3 x 3mm |
| Art. | Description | Unit | Price | Quantity | |
|---|---|---|---|---|---|
| 629-40 | Test grating TGT-1500, 3 m pitch, unmounted | Each | € 306,40 | ||
| 629-40AFM | Test grating TGT-1500, 3 m pitch, mounted on 12mm AFM disc | Each | € 326,00 |