Test Grating for X-, Y- and Z-direction

The TG3D-3000/20 test grating with its truly 3-Dimensional structure is intended for simultaneous calibration in X-, Y- and Z-direction, lateral calibration of SPM scanners and detection of any lateral nonlinearity, hysteresis, creep and cross-coupling effects.

Structure:	Si wafer with SiO2 layer for grating
Pattern type:	3-Dimensional array of small squares
Height:	20 ±1.5nm
Square size:	1.5 ±0.15 µm
Period:	3 ±0.05 µm
Chip size:	5 x 5 x 0.5mm
Effective area:	Central square of 3 x 3mm

Note: The precision on the height is based on the measurement of 5 gratings (randomly selected from a batch of 300 gratings) by an SPM calibrated by a PTB certified TGZ-20 grating.
The basic step height can vary from the specified one within 10% (example: step height can be 22 1.5nm).