Test Grating for Lateral Calibration

The TG3D-3000/600 test grating with its 3-Dimensional array is intended for lateral calibration of SPM scanners, detection of lateral nonlinearity, hysteresis, creep, cross-coupling effects and for determination of the tip aspect ratio.

Structure:	Si wafer with grating in top surface
Pattern type:	Chessboard like array of square pillars with sharp undercut edges
Height:	0.3 – 0.6 µm
Top square size	1.2 x 1.2 µm
Edge radius:	­≤10nm
Period:	3 ±0.05 µm
Chip size:	5 x 5 x 0.5mm
Effective area:	Central square of 3 x 3mm

Note: The precision on the height is based on the measurement of 5 gratings (randomly selected from a batch of 300 gratings) by an SPM calibrated by a PTB certified TGZ-20 grating.
The basic step height can vary from the specified one within 10% (example: step height can be 22 1.5nm).