An Intelligent Head

Adding the final touch!

Safematic sets new standards in laboratory coating with its compact sputter head.
Our SP-011 sputtering system is designed for high quality sputter deposition.

See for yourself the smaller form factor and the numerous features that our engineers have packed into this head.
The magnetron of the SP-011 sputter unit is designed for high power sputtering and for a broad range of coating materials.

Our sputtering modules plug into our CCU-010 HV and CCU-010 LV coating systems and are immediately ready to go.

Specifications

Features

• The magnetron sputter head allows high sputtering rates.
• For a extensive range of sputtering materials (Fe, ITO, C, etc.).
• Use of targets with a diameter of 54 mm and thickness of up to 3 mm.
• Targets can be changed easily and quickly.
• The high target utilization saves costs.
• Sputtering of indium tin oxide (ITO) and carbon is possible. (Prerequisite: basic device CCU-010 HV)
• Detection and monitoring of implosion guard guarantees safe operation.
• Automatic target shutter.
• Electronically controlled process vacuum ensures stable pressure in the receptacle.
• Target cooling with temperature monitoring ensures smooth operation.
• Circular gas orifice ensures homogeneous process gas distribution.
• Uniform electrical and pneumatic interface for use with basic units CCU-010.
• No high voltage at electrical interfaces, because high-voltage supply is integrated into the head.
• Automatic process head recognition.
• Small size and weight.