2D Holographic Array Standards
| Period: | 144nm pitch, two-dimensional array. Accurate to 1nm. Refer to calibration certificate for actual pitch.Surface:Aluminum bumps on Silicon, 4x3mm die. Bump height (about 90nm) and width (about 75nm) are not calibrated. |
| Usability: | The calibrated pattern covers the entire chip. There is sufficient usable area to make tens of thousands of measurements without reusing any areas altered or contaminated by previous scans. |
| AFM: | Use in contact, intermittent contact (TappingMode ) and other modes with image sizes from 250nm to 10 m. Available unmounted or mounted on 12mm steel disks. |
| SEM: | This specimen works well at all accelerating voltages. Normally supplied unmounted. Can be mounted on a stub of your choice of SEM Mount |
| Model 2D: | This Calibration Reference specimen comes with a non-traceable, manufacturer s certificate. This states the average period, based on batch measurements. |
| Model 2DUTC: | This Traceable, Certified Standard is a select grade. Each standard is individually measured in comparison with a similar specimen calibrated at PTB. (PTB, Physikalisch-Technischen Bundesanstalt, is the German counterpart of NIST.) The uncertainty of single pitch values is typically 1.4nm (95% confidence interval). Multi-pitch measurements provide the usual square-root of N improvement in precision. |
| Type | Prod. No. | Data (D=Head dia.; P=Pin dia.; PL=Pin (length) | |
|---|---|---|---|
| A | 16111 |  | Pin Mount: D=12.7mm; P=3.2mm; PL= 7.9mm, FEI/Philips, Cambridge, Leica, TESCAN, CAMSCAN, ASPEX, Phenom |
| B | 16261 |  | Pin Mount: D=12.7mm; P=3.2mm; PL=14.3mm, AMRAY |
| C | 16221 |  | 9.5mm dia. x 9.5mm Cylinder, JEOL |
| D | 16281 |  | 15mm dia. x 15mm Cylinder, JEOL, ISI/ABT/TOPCON |
| E | 16291 |  | 15mm dia. x 10mm Cylinder, JEOL, ISI/ABT/TOPCON |
| F | 16111-9 | | Pin Mount: 12.7mm x 3.2mm pin. PL=6mm, ZEISS/LEO SEMS FESEMs/FIBS |
| G | You Supply Mount or Mount of Your Choice, not listed here (contact customer service) | ||
| K | 16324 |  | 15mm dia. x 6mm Cylinder, M4 Hitachi, Agilent / Keysight |
| L | 16327 |  | 25mm dia. x 6mm Cylinder, M4 Hitachi, Agilent / Keysight |
| M | 16231 |  | 12.2mm dia. x 10mm Cylinder, JEOL |
| O | 16115 |  | 31.7mm dia. x 6.47mm, Cambridge S4 Mount |
| P | 16242 |  | Pin Mount: 12.7mm dia. x 15.7mm height, AMRAY special slotted head |
| Q | 16153 |  | 25mm dia. x 10mm Cylinder, JEOL |
| R | 16144 |  | Pin mount: D=25.4mm; pin=3.2mm, FEI/Philips, Cambridge, Leica, TESCAN, CAMSCAN, ASPEX, Phenom |
| Art. | Description | Unit | Price | Quantity | |
|---|---|---|---|---|---|
| 16465-2DUTC | 144nm 2DUTC Pattern Calibration Standard, unmounted, with certificate | Each | € 10.952,70 | ||
| 16465-2DUTC-A | 144nm 2DUTC Pattern Calibration Standard, on Mount A, with certificate | Each | € 9.256,70 | ||
| 16465-2DUTC-B | 144nm 2DUTC Pattern Calibration Standard, on Mount B, with certificate | Each | € 11.907,30 | ||
| 16465-2DUTC-C | 144nm 2DUTC Pattern Calibration Standard, on Mount C, with certificate | Each | € 8.838,00 | ||
| 16465-2DUTC-D | 144nm 2DUTC Pattern Calibration Standard, on Mount D, with certificate | Each | € 11.907,30 | ||
| 16465-2DUTC-E | 144nm 2DUTC Pattern Calibration Standard, on Mount E, with certificate | Each | p.o.r | ||
| 16465-2DUTC-F | 144nm 2DUTC Pattern Calibration Standard, on Mount F, with certificate | Each | € 8.338,10 | ||
| 16465-2DUTC-G | 144nm 2DUTC Pattern Calibration Standard, on Mount G, you supply mount, with certificate | Each | € 12.064,20 | ||
| 16465-2DUTC-K | 144nm 2DUTC Pattern Calibration Standard, on Mount K, with certificate | Each | € 11.907,30 | ||
| 16465-2DUTC-L | 144nm 2DUTC Pattern Calibration Standard, on Mount L, with certificate | Each | € 11.907,30 | ||
| 16465-2DUTC-M | 144nm 2DUTC Pattern Calibration Standard, on Mount M, with certificate | Each | p.o.r | ||
| 16465-2DUTC-O | 144nm 2DUTC Pattern Calibration Standard, on Mount O, with certificate | Each | € 11.907,30 | ||
| 16465-2DUTC-P | 144nm 2DUTC Pattern Calibration Standard, on Mount P, with certificate | Each | € 11.907,30 | ||
| 16465-2DUTC-Q | 144nm 2DUTC Pattern Calibration Standard, on Mount Q, with certificate | Each | € 11.907,30 | ||
| 16465-2DUTC-R | 144nm 2DUTC Pattern Calibration Standard, on Mount R, with certificate | Each | € 8.338,10 | ||
| 16465-2DUTC-AFM | 144nm 2DUTC Pattern Calibration Standard, on 12mm steel disk, with certificate | Each | € 8.838,00 |