 (overview with location bars) | Version with a 500-200-100nm structure
(structure) |
This advanced CD calibration test specimen is suited for calibrating smaller structures. The 500-200-100nm test specimen comprises 3 line patterns, each identified by its pitch.
Each pattern has 5 bars and spaces with equal pitch: 500nm, 200nm and 100nm. The central area may be used for AFM measurements.
The patterns are etched into Si with a depth of approx. 45-50nm. There is no coating on the Si surface.
On some CD calibration targets one of the 100nm lines can be missing. This is a normal occurrence and does not influence performance of the specimen.
| Pattern Size | 500nm | 200nm | 100nm |
|---|---|---|---|
| Accuracy | 0.30% | 0.55% | 0.50% |
| Uniformity | 0.24% | 0.60% | 1.20% |
| Type | Prod. No. | Data (D=Head dia.; P=Pin dia.; PL=Pin (length) | |
|---|---|---|---|
| A | 16111 |  | Pin Mount: D=12.7mm; P=3.2mm; PL= 7.9mm, FEI/Philips, Cambridge, Leica, TESCAN, CAMSCAN, ASPEX, Phenom |
| B | 16261 |  | Pin Mount: D=12.7mm; P=3.2mm; PL=14.3mm, AMRAY |
| C | 16221 |  | 9.5mm dia. x 9.5mm Cylinder, JEOL |
| D | 16281 |  | 15mm dia. x 15mm Cylinder, JEOL, ISI/ABT/TOPCON |
| E | 16291 |  | 15mm dia. x 10mm Cylinder, JEOL, ISI/ABT/TOPCON |
| F | 16111-9 | | Pin Mount: 12.7mm x 3.2mm pin. PL=6mm, ZEISS/LEO SEMS FESEMs/FIBS |
| G | You Supply Mount or Mount of Your Choice, not listed here (contact customer service) | ||
| K | 16324 |  | 15mm dia. x 6mm Cylinder, M4 Hitachi, Agilent / Keysight |
| L | 16327 |  | 25mm dia. x 6mm Cylinder, M4 Hitachi, Agilent / Keysight |
| M | 16231 |  | 12.2mm dia. x 10mm Cylinder, JEOL |
| O | 16115 |  | 31.7mm dia. x 6.47mm, Cambridge S4 Mount |
| P | 16242 |  | Pin Mount: 12.7mm dia. x 15.7mm height, AMRAY special slotted head |
| Q | 16153 |  | 25mm dia. x 10mm Cylinder, JEOL |
| R | 16144 |  | Pin mount: D=25.4mm; pin=3.2mm, FEI/Philips, Cambridge, Leica, TESCAN, CAMSCAN, ASPEX, Phenom |
| Art. | Description | Unit | Price | Quantity | |
|---|---|---|---|---|---|
| 618-4 | CD Structure 500-200-100nm Specimen, non-certified, unmounted | Each | € 866,10 | ||
| 618-4A | CD Structure 500-200-100nm Specimen, non-certified, Mount A | Each | € 868,90 | ||
| 618-4B | CD Structure 500-200-100nm Specimen, non-certified, Mount B | Each | € 868,90 | ||
| 618-4C | CD Structure 500-200-100nm Specimen, non-certified, Mount C | Each | € 868,90 | ||
| 618-4D | CD Structure 500-200-100nm Specimen, non-certified, Mount D | Each | € 868,90 | ||
| 618-4E | CD Structure 500-200-100nm Specimen, non-certified, Mount E | Each | € 868,90 | ||
| 618-4F | CD Structure 500-200-100nm Specimen, non-certified, Mount F | Each | € 868,90 | ||
| 618-4G | CD Structure 500-200-100nm Specimen, non-certified, Mount G, You Supply Mount | Each | p.o.r | ||
| 618-4K | CD Structure 500-200-100nm Specimen, non-certified, Mount K | Each | € 868,90 | ||
| 618-4L | CD Structure 500-200-100nm Specimen, non-certified, Mount L | Each | € 868,90 | ||
| 618-4M | CD Structure 500-200-100nm Specimen, non-certified, Mount M | Each | € 868,90 | ||
| 618-4O | CD Structure 500-200-100nm Specimen, non-certified, Mount O | Each | € 868,90 | ||
| 618-4P | CD Structure 500-200-100nm Specimen, non-certified, Mount P | Each | € 868,90 | ||
| 618-4Q | CD Structure 500-200-100nm Specimen, non-certified, Mount Q | Each | € 868,90 | ||
| 618-4R | CD Structure 500-200-100nm Specimen, non-certified, Mount R | Each | € 868,90 |
