“Critical Dimension (CD) structures” are particularly useful for SEM / FIB magnification calibration and may be used for AFM.
Microscopists and engineers using high performance SEMs or FIB systems will find this calibration test specimen useful. The 4.8 x 4.8mm silicon standard has a series of patterns with a side length of 480 m around its edges, helpful for orientation. There are three versions available.
Based on the measurement of 9 different standards, the accuracy and uniformity are:
| Pattern Size | 10 m | 5 m | 2 m | 1 m | 0.5 m |
|---|---|---|---|---|---|
| Accuracy | 0.20% | 0.22% | 0.35% | 0.56% | 0.78% |
| Uniformity | 0.27% | 0.34% | 0.53% | 0.80% | 1.2% |
| Type | Prod. No. | Data (D=Head dia.; P=Pin dia.; PL=Pin (length) | |
|---|---|---|---|
| A | 16111 |  | Pin Mount: D=12.7mm; P=3.2mm; PL= 7.9mm, FEI/Philips, Cambridge, Leica, TESCAN, CAMSCAN, ASPEX, Phenom |
| B | 16261 |  | Pin Mount: D=12.7mm; P=3.2mm; PL=14.3mm, AMRAY |
| C | 16221 |  | 9.5mm dia. x 9.5mm Cylinder, JEOL |
| D | 16281 |  | 15mm dia. x 15mm Cylinder, JEOL, ISI/ABT/TOPCON |
| E | 16291 |  | 15mm dia. x 10mm Cylinder, JEOL, ISI/ABT/TOPCON |
| F | 16111-9 | | Pin Mount: 12.7mm x 3.2mm pin. PL=6mm, ZEISS/LEO SEMS FESEMs/FIBS |
| G | You Supply Mount or Mount of Your Choice, not listed here (contact customer service) | ||
| K | 16324 |  | 15mm dia. x 6mm Cylinder, M4 Hitachi, Agilent / Keysight |
| L | 16327 |  | 25mm dia. x 6mm Cylinder, M4 Hitachi, Agilent / Keysight |
| M | 16231 |  | 12.2mm dia. x 10mm Cylinder, JEOL |
| O | 16115 |  | 31.7mm dia. x 6.47mm, Cambridge S4 Mount |
| P | 16242 |  | Pin Mount: 12.7mm dia. x 15.7mm height, AMRAY special slotted head |
| Q | 16153 |  | 25mm dia. x 10mm Cylinder, JEOL |
| R | 16144 |  | Pin mount: D=25.4mm; pin=3.2mm, FEI/Philips, Cambridge, Leica, TESCAN, CAMSCAN, ASPEX, Phenom |
| Art. | Description | Unit | Price | Quantity | |
|---|---|---|---|---|---|
| 618-7 | CD Structure 10-5-2-1-0.5 m Specimen, unmounted | Each | € 2.007,40 | ||
| 618-7A | CD Structure 10-5-2-1-0.5 m Specimen, Certified, Mount A | Each | € 1.826,00 | ||
| 618-7B | CD Structure 10-5-2-1-0.5 m Specimen, Certified, Mount B | Each | € 1.826,00 | ||
| 618-7C | CD Structure 10-5-2-1-0.5 m Specimen, Certified, Mount C | Each | € 1.826,00 | ||
| 618-7D | CD Structure 10-5-2-1-0.5 m Specimen, Certified, Mount D | Each | € 1.826,00 | ||
| 618-7E | CD Structure 10-5-2-1-0.5 m Specimen, Certified, Mount E | Each | € 1.826,00 | ||
| 618-7F | CD Structure 10-5-2-1-0.5 m Specimen, Certified, Mount F | Each | € 1.826,00 | ||
| 618-7G | CD Structure 10-5-2-1-0.5 m Specimen, Certified, Mount G, You Supply Mount | Each | p.o.r | ||
| 618-7K | CD Structure 10-5-2-1-0.5 m Specimen, Certified, Mount K | Each | € 1.826,00 | ||
| 618-7L | CD Structure 10-5-2-1-0.5 m Specimen, Certified, Mount L | Each | € 1.826,00 | ||
| 618-7M | CD Structure 10-5-2-1-0.5 m Specimen, Certified, Mount M | Each | € 1.826,00 | ||
| 618-7O | CD Structure 10-5-2-1-0.5 m Specimen, Certified, Mount O | Each | € 1.826,00 | ||
| 618-7P | CD Structure 10-5-2-1-0.5 m Specimen, Certified, Mount P | Each | € 1.826,00 | ||
| 618-7Q | CD Structure 10-5-2-1-0.5 m Specimen, Certified, Mount Q | Each | € 1.826,00 | ||
| 618-7R | CD Structure 10-5-2-1-0.5 m Specimen, Certified, Mount R | Each | € 1.826,00 |