2D Holographic Array Standards
300nm Pitch High Resolution 2D Calibration Standard for AFM, STEM, SEM, Auger and FIB.
| Period: | 300nm pitch nominal, two dimensional array accurate to 1nm. Calibration certificate will give the actual pitch of the standard. |
| Surface Structure: | Aluminum bumps on Silicon, 4x3mm die: Bump height (about 50nm) and width (about 150nm) not calibrated. |
| Usability: | The calibrated pattern covers the entire chip. There is sufficient usable area to make thousands of measurements without reusing any areas contaminated or altered by previous scans. |
| AFM: | Use in contact, tapping and other modes with image sizes from 500nm to 20nm. Mounted on a 12mm steel AFM disk. |
| SEM: | Auger, FIB: Can be used for a wide range of accelerating voltage (1kV-20kV) and calibrates images from 5kX to 200kX. Can be supplied unmounted or mounted on an SEM stub of your choice, SEM Mount Selection A-R. |
| Certification: | Supplied with a non-traceable manufacturer’s certificate stating average pitch, based on batch measurements. |
| Type | Prod. No. | Data (D=Head dia.; P=Pin dia.; PL=Pin (length) | |
|---|---|---|---|
| A | 16111 |  | Pin Mount: D=12.7mm; P=3.2mm; PL= 7.9mm, FEI/Philips, Cambridge, Leica, TESCAN, CAMSCAN, ASPEX, Phenom |
| B | 16261 |  | Pin Mount: D=12.7mm; P=3.2mm; PL=14.3mm, AMRAY |
| C | 16221 |  | 9.5mm dia. x 9.5mm Cylinder, JEOL |
| D | 16281 |  | 15mm dia. x 15mm Cylinder, JEOL, ISI/ABT/TOPCON |
| E | 16291 |  | 15mm dia. x 10mm Cylinder, JEOL, ISI/ABT/TOPCON |
| F | 16111-9 | | Pin Mount: 12.7mm x 3.2mm pin. PL=6mm, ZEISS/LEO SEMS FESEMs/FIBS |
| G | You Supply Mount or Mount of Your Choice, not listed here (contact customer service) | ||
| K | 16324 |  | 15mm dia. x 6mm Cylinder, M4 Hitachi, Agilent / Keysight |
| L | 16327 |  | 25mm dia. x 6mm Cylinder, M4 Hitachi, Agilent / Keysight |
| M | 16231 |  | 12.2mm dia. x 10mm Cylinder, JEOL |
| O | 16115 |  | 31.7mm dia. x 6.47mm, Cambridge S4 Mount |
| P | 16242 |  | Pin Mount: 12.7mm dia. x 15.7mm height, AMRAY special slotted head |
| Q | 16153 |  | 25mm dia. x 10mm Cylinder, JEOL |
| R | 16144 |  | Pin mount: D=25.4mm; pin=3.2mm, FEI/Philips, Cambridge, Leica, TESCAN, CAMSCAN, ASPEX, Phenom |
| Art. | Description | Unit | Price | Quantity | |
|---|---|---|---|---|---|
| 16475-1 | 300nm 2D Resolution AFM Reference Standard, unmounted | Each | € 1.594,40 | ||
| 16475-1A | 300nm 2D Resolution AFM Reference Standard on Mount A | Each | € 1.788,80 | ||
| 16475-1B | 300nm 2D Resolution AFM Reference Standard on Mount B | Each | € 1.762,80 | ||
| 16475-1C | 300nm 2D Resolution AFM Reference Standard on Mount C | Each | € 1.762,80 | ||
| 16475-1D | 300nm 2D Resolution AFM Reference Standard on Mount D | Each | € 1.762,80 | ||
| 16475-1E | 300nm 2D Resolution AFM Reference Standard on Mount E | Each | p.o.r | ||
| 16475-1F | 300nm 2D Resolution AFM Reference Standard on Mount F | Each | € 1.762,80 | ||
| 16475-1G | 300nm 2D Resolution AFM Reference Standard on Mount G, you supply mount | Each | € 1.905,70 | ||
| 16475-1K | 300nm 2D Resolution AFM Reference Standard on Mount K | Each | € 1.707,20 | ||
| 16475-1L | 300nm 2D Resolution AFM Reference Standard on Mount L | Each | € 1.762,80 | ||
| 16475-1M | 300nm 2D Resolution AFM Reference Standard on Mount M | Each | € 1.762,80 | ||
| 16475-1O | 300nm 2D Resolution AFM Reference Standard on Mount O | Each | € 1.762,80 | ||
| 16475-1P | 300nm 2D Resolution AFM Reference Standard on Mount P | Each | € 1.762,80 | ||
| 16475-1Q | 300nm 2D Resolution AFM Reference Standard on Mount Q | Each | € 1.762,80 | ||
| 16475-1R | 300nm 2D Resolution AFM Reference Standard on Mount R | Each | € 1.547,80 | ||
| 16475-1AFM | 300nm 2D Resolution AFM Reference Standard on 12mm steel disc | Each | € 1.707,20 |