Products
CDMS-XY ISO
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Pelcotec™ CDMS-XY ISO Critical Dimension Magnification Standard
Easy to use and very useful for quick and precise SEM, FE-SEM, FIB, CD-SEM, LM, and AFM
magnification calibration in the X axis.
These calibration standards are unique, economically priced, yet fully-featured and traceable for a wide measurement range. They are made using the latest semiconductor and MEMS manufacturing techniques.
The Pelcotec™ CDMS Calibration Standard is available in two feature size ranges and as traceable at the wafer level to a NIST standard (ISO 17025:2017 Sampling Scope of Accreditation) or individually certified to a NIST standard in an ISO 17205:2017 accredited calibration laboratory, for a total of four versions. Recertification of these ISO critical dimension standards in an ISO 17205:2017 accredited calibration laboratory is available.
Pelcotec™ CDMS-1T-ISO
Fully traceable at the wafer level to a NIST standard (ISO 17025:2017 Sampling Scope of Accreditation). Has features from 2.0mm to 1um for a magnification range from 10x – 20,000x; ideal for desktop SEMs and low to medium magnification applications.
Representative CDMS-1T-ISO Traceable Certificate (325KB PDF)
Pelcotec™ CDMS-0.1T-ISO
Fully traceable at the wafer level to a NIST standard (ISO 17025:2017 Sampling Scope of Accreditation). Has features from 2.0mm to 100nm for a magnification range from 10x – 200,000x; for all SEM and most FE-SEM applications.
Representative CDMS-0.1T-ISO Traceable Certificate (328KB PDF)
* Pelcotec™ CDMS-1C-ISO
Individually certified in an ISO 17205:2017 accredited calibration laboratory against a NIST standard. Has features from 2.0mm to 1µm for a magnification range from 10x – 20,000x; ideal for desk top SEMs and low to medium magnification applications.
Representative CDMS-1C-ISO Conformance Certificate (3680KB PDF)
* Pelcotec™ CDMS-0.1C-ISO
Individually certified in an ISO 17205:2017 accredited calibration laboratory against a NIST standard with features from 2.0mm to 100nm for a magnification range up to 10x – 200,000x; for all SEM and most FE-SEM applications.
Representative CDMS-0.1C-ISO Conformance Certificate (477KB PDF)
Pelcotec™ Technical Notes for CDMS ISO – Critical Dimension Magnification Standards (149KB PDF)
* Recertification in an ISO 17025:2017 accredited calibration laboratory available.
500nm, 250nm and 100nm lines are only on the CDMS-0.1T-ISO and CDMS-0.1C-ISO product families
Feature sizes for the Pelcotec™ CDMS-1T-ISO and -1C-ISO are:
2mm, 1mm, 0.5mm, 0.25mm, 10µm, 5µm, 2µm and 1µm.
Feature sizes for the Pelcotec™ CDMS-0.1T-ISO and 0.1C-ISO are:
2mm, 1mm, 0.5mm, 0.25mm, 10µm, 5µm, 2µm, 1µm, 500nm, 250nm and 100nm.
The Pelcotec™ CDMS ISO Critical Dimensions and Magnification Standards are made on an ultra flat silicon substrate with a precise 50nm chromium deposition for the features up to 5µm and a combination of 50nm gold over 20nm chromium for the features from 2µm to 100nm.
The Cr and Au/Cr on Si provide excellent contrast both in SE and BSE imaging mode.
The features are easier to determine than on etched Si standards. Since the silicon substrate, the chromium and the chromium/gold features are all conductive, there are no charging issues with this calibration standard.
Due to its sturdy construction the CDMS standard can be cleaned using a plasma cleaner on low settings.
The smaller features are nested for easy navigation and quick calibration. The accuracy of the features is 0.3% or better.
The actual size of the standard is 2.5 x 2.5mm with a thickness of 525µm ±10µm. There is no coating on the Si surface. Each Pelcotec™ CDMS ISO calibration standard has a unique identification number.
Comparison Table
| Pelcotec™ CDMS-XY-1-ISO | Pelcotec™ CDMS-XY-0.1-ISO | |
|---|---|---|
| Substrate size: 2.5 x 2.5mm | ✓ | ✓ |
| Substrate thickness: 525 ±10µm | ✓ | ✓ |
| Unique serial identification number per chip | ✓ | ✓ |
| Calibration squares at 2mm, 1mm, 0.5mm | ✓ | ✓ |
| Graticule lines perpendicular to X and Y axes ruled at 10um, 5µm, 2µm and 1µm pitch | ✓ | ✓ |
| High Resolution version only – Additional graticule lines perpendicular to X and Y axes ruled at 500, 250 and 100nm pitch | — | ✓ |
| Feature material: 50nm Cr (2mm – 5µm) | ✓ | ✓ |
| Feature material: 20nm Cr/50nm Au (2µm and 1µm) | ✓ | ✓ |
| Feature material: 20nm Cr/50nm Au (500, 250 and 100nm) | — | ✓ |
| Traceable at the wafer level to NIST (ISO 17025:2017 Sampling Scope of Accreditation) | T versions | T versions |
| Direct certification of CDMS chip to a NIST standard (ISO 17025:2017 Sampling Scope of Accreditation) | C versions | C versions |
| Recertification of CDMS chip to a NIST standard (ISO 17025:2017 Sampling Scope of Accreditation) available | C versions only | C versions only |
| Available unmounted | ✓ | ✓ |
| SEM mounts A-R available | ✓ | ✓ |
| Precision better than 0.3% | ✓ | ✓ |
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Product
Description
SEM Holders
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Product
PELCO CDMS-XY-1T,ISO
2mm-1µm, Traceable
no. 693-1 to 693-1S
Description
Traceable at the wafer level to a NIST standard (ISO 17025:2017 Sampling Scope of Accreditation) with features from 2mm to 1µm for magnification 10x-20,000x, ideal for desktop SEM.
Feature sizes: 2mm, 1mm, 0.5mm, 0.1mm, 50µm, 10µm, 5µm, 2µm, and 1µm
SEM Holders
SEM Holders
| Type | Prod. No. | Data (D=Head dia.; P=Pin dia.; PL=Pin (length) | |
|---|---|---|---|
| A | 16111 |  |
Pin Mount: D=12.7mm; P=3.2mm; PL= 7.9mm, FEI/Philips, Cambridge, Leica, TESCAN, CAMSCAN, ASPEX, Phenom |
| B | 16261 |  |
Pin Mount: D=12.7mm; P=3.2mm; PL=14.3mm, AMRAY |
| C | 16221 |  |
9.5mm dia. x 9.5mm Cylinder, JEOL |
| D | 16281 |  |
15mm dia. x 15mm Cylinder, JEOL, ISI/ABT/TOPCON |
| E | 16291 |  |
15mm dia. x 10mm Cylinder, JEOL, ISI/ABT/TOPCON |
| F | 16111-9 | |
Pin Mount: 12.7mm x 3.2mm pin. PL=6mm, ZEISS/LEO SEMS FESEMs/FIBS |
| G | You Supply Mount or Mount of Your Choice, not listed here (contact customer service) | ||
| K | 16324 |  |
15mm dia. x 6mm Cylinder, M4 Hitachi, Agilent / Keysight |
| L | 16327 |  |
25mm dia. x 6mm Cylinder, M4 Hitachi, Agilent / Keysight |
| M | 16231 |  |
12.2mm dia. x 10mm Cylinder, JEOL |
| O | 16115 |  |
31.7mm dia. x 6.47mm, Cambridge S4 Mount |
| P | 16242 |  |
Pin Mount: 12.7mm dia. x 15.7mm height, AMRAY special slotted head |
| Q | 16153 |  |
25mm dia. x 10mm Cylinder, JEOL |
| R | 16144 |  |
Pin mount: D=25.4mm; pin=3.2mm, FEI/Philips, Cambridge, Leica, TESCAN, CAMSCAN, ASPEX, Phenom |
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Product
Description
SEM Holders
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Product
PELCO CDMS-XY-0.1T
2mm-100nm, Traceable
no. 694-01 to 691-01S
Description
Traceable at the wafer level to NIST standard (ISO 17025:2017 Sampling Scope of Accreditation) with features from 2mm to 100nm for magnification 10x-200,000x for SE, FE-SEM and FIB.
Feature sizes: 2mm, 1mm, 0.5mm, 0.1mm, 50µm, 10µm, 5µm, 2µm, 1µm, 500nm, 250nm and 100nm
SEM Holders
SEM Holders
| Type | Prod. No. | Data (D=Head dia.; P=Pin dia.; PL=Pin (length) | |
|---|---|---|---|
| A | 16111 | |
Pin Mount: D=12.7mm; P=3.2mm; PL= 7.9mm, FEI/Philips, Cambridge, Leica, TESCAN, CAMSCAN, ASPEX, Phenom |
| B | 16261 | |
Pin Mount: D=12.7mm; P=3.2mm; PL=14.3mm, AMRAY |
| C | 16221 | |
9.5mm dia. x 9.5mm Cylinder, JEOL |
| D | 16281 | |
15mm dia. x 15mm Cylinder, JEOL, ISI/ABT/TOPCON |
| E | 16291 | |
15mm dia. x 10mm Cylinder, JEOL, ISI/ABT/TOPCON |
| F | 16111-9 | |
Pin Mount: 12.7mm x 3.2mm pin. PL=6mm, ZEISS/LEO SEMS FESEMs/FIBS |
| G | You Supply Mount or Mount of Your Choice, not listed here (contact customer service) | ||
| K | 16324 | |
15mm dia. x 6mm Cylinder, M4 Hitachi, Agilent / Keysight |
| L | 16327 | |
25mm dia. x 6mm Cylinder, M4 Hitachi, Agilent / Keysight |
| M | 16231 | |
12.2mm dia. x 10mm Cylinder, JEOL |
| O | 16115 | |
31.7mm dia. x 6.47mm, Cambridge S4 Mount |
| P | 16242 | |
Pin Mount: 12.7mm dia. x 15.7mm height, AMRAY special slotted head |
| Q | 16153 | |
25mm dia. x 10mm Cylinder, JEOL |
| R | 16144 | |
Pin mount: D=25.4mm; pin=3.2mm, FEI/Philips, Cambridge, Leica, TESCAN, CAMSCAN, ASPEX, Phenom |
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Product
Description
SEM Holders
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Product
PELCO CDMS-XY-1C, ISO
2mm-1µm, Certified
no. 697-1 to 697-1S
Description
Certified to a NIST standard in an ISO 17205:2017 accredited calibration lab with features from 2mm to 1µm for magnification 10x-20,000x, ideal for desktop SEM.
Feature sizes: 2mm, 1mm, 0.5mm, 0.1mm, 50µm, 10µm, 5µm, 2µm, and 1µm.
Recertification service in an ISO 17025:2017 accredited calibration laboratory available (see #697-1-RECERT in the product table below).
SEM Holders
SEM Holders
| Type | Prod. No. | Data (D=Head dia.; P=Pin dia.; PL=Pin (length) | |
|---|---|---|---|
| A | 16111 | |
Pin Mount: D=12.7mm; P=3.2mm; PL= 7.9mm, FEI/Philips, Cambridge, Leica, TESCAN, CAMSCAN, ASPEX, Phenom |
| B | 16261 | |
Pin Mount: D=12.7mm; P=3.2mm; PL=14.3mm, AMRAY |
| C | 16221 | |
9.5mm dia. x 9.5mm Cylinder, JEOL |
| D | 16281 | |
15mm dia. x 15mm Cylinder, JEOL, ISI/ABT/TOPCON |
| E | 16291 | |
15mm dia. x 10mm Cylinder, JEOL, ISI/ABT/TOPCON |
| F | 16111-9 | |
Pin Mount: 12.7mm x 3.2mm pin. PL=6mm, ZEISS/LEO SEMS FESEMs/FIBS |
| G | You Supply Mount or Mount of Your Choice, not listed here (contact customer service) | ||
| K | 16324 | |
15mm dia. x 6mm Cylinder, M4 Hitachi, Agilent / Keysight |
| L | 16327 | |
25mm dia. x 6mm Cylinder, M4 Hitachi, Agilent / Keysight |
| M | 16231 | |
12.2mm dia. x 10mm Cylinder, JEOL |
| O | 16115 | |
31.7mm dia. x 6.47mm, Cambridge S4 Mount |
| P | 16242 | |
Pin Mount: 12.7mm dia. x 15.7mm height, AMRAY special slotted head |
| Q | 16153 | |
25mm dia. x 10mm Cylinder, JEOL |
| R | 16144 | |
Pin mount: D=25.4mm; pin=3.2mm, FEI/Philips, Cambridge, Leica, TESCAN, CAMSCAN, ASPEX, Phenom |
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Product
Description
SEM Holders
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Product
PELCO CDMS-XY-0,1C, ISO
2mm-1µm, Certified
no. 698-01 to 698-01S
Description
Certified to a NIST standard in an ISO 17205:2017 accredited calibration lab with features from 2mm to 100nm for magnification 10x-200,000x for SEM, FE-SEM and FIB.
Feature sizes: 2mm, 1mm, 0.5mm, 0.1mm, 50µm 10µm, 5µm, 2µm, 1µm, 500nm, 250nm, and 100nm.
Recertification service in an ISO 17025:2017 accredited calibration laboratory available (see #698-01-RECERT in the product table below).
SEM Holders
SEM Holders
| Type | Prod. No. | Data (D=Head dia.; P=Pin dia.; PL=Pin (length) | |
|---|---|---|---|
| A | 16111 | |
Pin Mount: D=12.7mm; P=3.2mm; PL= 7.9mm, FEI/Philips, Cambridge, Leica, TESCAN, CAMSCAN, ASPEX, Phenom |
| B | 16261 | |
Pin Mount: D=12.7mm; P=3.2mm; PL=14.3mm, AMRAY |
| C | 16221 | |
9.5mm dia. x 9.5mm Cylinder, JEOL |
| D | 16281 | |
15mm dia. x 15mm Cylinder, JEOL, ISI/ABT/TOPCON |
| E | 16291 | |
15mm dia. x 10mm Cylinder, JEOL, ISI/ABT/TOPCON |
| F | 16111-9 | |
Pin Mount: 12.7mm x 3.2mm pin. PL=6mm, ZEISS/LEO SEMS FESEMs/FIBS |
| G | You Supply Mount or Mount of Your Choice, not listed here (contact customer service) | ||
| K | 16324 | |
15mm dia. x 6mm Cylinder, M4 Hitachi, Agilent / Keysight |
| L | 16327 | |
25mm dia. x 6mm Cylinder, M4 Hitachi, Agilent / Keysight |
| M | 16231 | |
12.2mm dia. x 10mm Cylinder, JEOL |
| O | 16115 | |
31.7mm dia. x 6.47mm, Cambridge S4 Mount |
| P | 16242 | |
Pin Mount: 12.7mm dia. x 15.7mm height, AMRAY special slotted head |
| Q | 16153 | |
25mm dia. x 10mm Cylinder, JEOL |
| R | 16144 | |
Pin mount: D=25.4mm; pin=3.2mm, FEI/Philips, Cambridge, Leica, TESCAN, CAMSCAN, ASPEX, Phenom |
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