Description
E-Beam Lithography Mount
The E-Beam Lithography Mount comprises:
- 2 ea PELCO SEMClips to hold the sample
- a Faraday ( 2.5mm with 100 m hole) cup to measure the beam current
- and a gold on carbon resolution sample ( 3mm) for resolution test
All mounted on a 25mm aluminum pin stub, positioned in such a way as to leave maximum sample space.
The height of the gold on carbon test specimen is approximately 0.5mm above the surface of the mount.
The Gold on Carbon is similar to #617 with gold particle size range from approx. 5nm to 150nm.
Shipped in plastic storage box.
Pin length is 8.5mm.
Material: Aluminum with copper clips and brass screws.
Screw used is M2 x 3mm, Pan, Brass