NIST traceable* with features from 2mm to 100nm for magnification 10x-200,000x for SEM, FE-SEM and FIB.
*Uses average data measured for each production wafer.
Feature sizes: 2mm, 1mm, 0.5mm, 0.1mm, 50µm, 10µm, 5µm, 2µm, 1µm, 500nm, 250nm and 100nm
