Description
Calibration gratings from the TGXYZ series are arrays of different structures comprising rectangular silicon dioxide steps on a silicon wafer. The small square in the center with dimensions 500μm by 500μm includes circular pillars and holes, as well as lines in the X- and Y- direction with a pitch of 5μm. The large square with dimensions 1mm by 1mm contains square pillars and holes with a pitch of 10μm.
The TGXYZ calibration gratings are intended for vertical and lateral calibration of SPM scanners. The vertical non-linearity can be compensated for by using several calibration gratings with different nominal step heights.
The TGXYZ series of Calibration Gratings are supplied mounted on a round 12mm dia metal plate. They are also available unmounted if required.
Active area: 1 x 1mm
Chip dimensions: 5 x 5 x 0.3mm
| Cat. no. | Part number | Step height* | Height accuracy | Pitch | Pitch accuracy |
|---|---|---|---|---|---|
| AGF7021 | TGXYZ01 | 20nm | 2% | 5 and 10μm | 0.1μm |
| AGF7022 | TGXYZ02 | 100nm | 3% | 5 and 10μm | 0.1μm |
| AGF7023 | TGXYZ03 | 500nm | 3% | 5 and 10μm | 0.1μm |
* The step height value is given for information only, not for vertical calibration purposes
