Description
Test Grating for X-, Y- and Z-direction
The TG3D-3000/20 test grating with its truly 3-Dimensional structure is intended for simultaneous calibration in X-, Y- and Z-direction, lateral calibration of SPM scanners and detection of any lateral nonlinearity, hysteresis, creep and cross-coupling effects.
| Structure: | Si wafer with SiO2 layer for grating |  |
| Pattern type: | 3-Dimensional array of small squares | |
| Height: | 20 ±1.5nm | |
| Square size: | 1.5 ±0.15 µm | |
| Period: | 3 ±0.05 µm | |
| Chip size: | 5 x 5 x 0.5mm | |
| Effective area: | Central square of 3 x 3mm |
Note: The precision on the height is based on the measurement of 5 gratings (randomly selected from a batch of 300 gratings) by an SPM calibrated by a PTB certified TGZ-20 grating.
The basic step height can vary from the specified one within 10% (example: step height can be 22 1.5nm).
