Description

Pelcotec SFG12 Finder Grid Substrate

The innovative Pelcotec SFG12 finder grid substrate is a flat, conductive silicon substrate with a die size of 12.5 x 12.5mm.
It is covered with a 1 x 1mm raster giving a total of 12×12=144 fields.

Each field has a unique label using an alphanumeric pattern.
The lines and labels are precision laser etched in the silicon surface. It is the best combination of a flat specimen support and an SEM finder grid.

This unique and innovative product has some resemblance with an engraved SEM specimen mount, but it has a number of additional advantages:

Flat – there are no height differences like with copper finder grids
Fine pattern over a large area – better defined than engraved SEM mounts
Low background signal – same as with Si chip substrates
For EDX analysis only one element (Si) from the finder substrate
Practical and easy to navigate – 1mm spacing with 144 fields
Pattern is visible with naked eye, preparation microscope and SEM
Gives an approximate size at (very) low magnification
Can easily be mounted on SEM sample stubs – compatible with most popular sizes
Can be used with SEM, FIB, XPS/ESCA, Auger and LM

Specifications of the silicon substrate used: prime virgin silicon wafer, P Boron doped, <100> orientation, resistivity of 0.5-35 ohm/cm, thickness 645 m 55 m.