Description
E-Beam Lithography Mount
The E-Beam Lithography Mount comprises:
- 2 ea PELCO SEMClips to hold the sample
- a Faraday cup ( 2.5mm with 100 m hole) to measure the beam current
- and a gold on carbon resolution sample ( 3mm) for resolution test
All mounted on a 25mm aluminum cylinder stub positioned in such a way as to leave maximum sample space.
The height of the gold on carbon test specimen is approximately 0.5mm above the surface of the mount. M4 threaded hole in bottom.
Material: Aluminum with copper clips and brass screws.
The Gold on Carbon is similar to #617 with gold particle size range from approximately 5nm to 150nm.
Shipped in plastic storage box.
Screw used is M2 x 3mm, pan head screw, brass.