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Critical Dimension (CD) Calibration Test Specimens

for SEM, FIB, and AFM

Version with a 10-5-2-1-0.5um structure

This CD calibration test specimen comprises 5 line patterns, each one clearly identified by its pitch.

Each pattern has five bars and spaces of equal pitch:10.0um, 5.0µm, 2.0µm, 1.0µm and 0.5µm. The central line area may be used for AFM measurements.

The patterns are etched into Si with a depth of approximately 200nm. There is no coating on the Si surface.

Two types are offered:

• non-certified
• certified by PTB (Physikalische Technische Bundesanstalt – German counter part of NIST) and individually numbered.

  Based on the measurement of 9 different standards, the accuracy and uniformity are:

  Pattern Size	10µm	5µm	2µm	1µm	0.5µm
  Accuracy	0.20%	0.22%	0.35%	0.56%	0.78%
  Uniformity	0.27%	0.34%	0.53%	0.80%	1.2%

  
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  CD Structure 10-5-2-1-0.5 m, non-certified
  Critical Dimension (CD) Calibration Test Specimens
  Art.
  no. 618-5 to 618-5R

  Description

  for SEM, FIB, and AFM

  “Critical Dimension (CD) structures” are particularly useful for SEM / FIB magnification calibration and may be used for AFM.

  Microscopists and engineers using high performance SEMs or FIB systems will find this calibration test specimen useful. The 4.8 x 4.8mm silicon standard has a series of patterns with a side length of 480 m around its edges, helpful for orientation. There are three versions available.

  Version with a 10-5-2-1-0.5um structureThis CD calibration test specimen comprises 5 line patterns, each one clearly identified by its pitch. Each pattern has five bars and spaces of equal pitch:10.0um, 5.0 m, 2.0 m, 1.0 m and 0.5 m. The central line area may be used for AFM measurements. The patterns are etched into Si with a depth of approximately 200nm. There is no coating on the Si surface. Two types are offered: non-certified certified by PTB (Physikalische Technische Bundesanstalt – German counter part of NIST) and individually numbered.

  Based on the measurement of 9 different standards, the accuracy and uniformity are:

  Pattern Size	10 m	5 m	2 m	1 m	0.5 m
  Accuracy	0.20%	0.22%	0.35%	0.56%	0.78%
  Uniformity	0.27%	0.34%	0.53%	0.80%	1.2%

  SEM Holders

  SEM Holders

  Type	Prod. No.		Data (D=Head dia.; P=Pin dia.; PL=Pin (length)
  A	16111		Pin Mount: D=12.7mm; P=3.2mm; PL= 7.9mm, FEI/Philips, Cambridge, Leica, TESCAN, CAMSCAN, ASPEX, Phenom
  B	16261		Pin Mount: D=12.7mm; P=3.2mm; PL=14.3mm, AMRAY
  C	16221		9.5mm dia. x 9.5mm Cylinder, JEOL
  D	16281		15mm dia. x 15mm Cylinder, JEOL, ISI/ABT/TOPCON
  E	16291		15mm dia. x 10mm Cylinder, JEOL, ISI/ABT/TOPCON
  F	16111-9		Pin Mount: 12.7mm x 3.2mm pin. PL=6mm, ZEISS/LEO SEMS FESEMs/FIBS
  G			You Supply Mount or Mount of Your Choice, not listed here (contact customer service)
  K	16324		15mm dia. x 6mm Cylinder, M4 Hitachi, Agilent / Keysight
  L	16327		25mm dia. x 6mm Cylinder, M4 Hitachi, Agilent / Keysight
  M	16231		12.2mm dia. x 10mm Cylinder, JEOL
  O	16115		31.7mm dia. x 6.47mm, Cambridge S4 Mount
  P	16242		Pin Mount: 12.7mm dia. x 15.7mm height, AMRAY special slotted head
  Q	16153		25mm dia. x 10mm Cylinder, JEOL
  R	16144		Pin mount: D=25.4mm; pin=3.2mm, FEI/Philips, Cambridge, Leica, TESCAN, CAMSCAN, ASPEX, Phenom

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  CD Structure 10-5-2-1-0.5 m, non-certified quantity
  
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  Description
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  CD Structure 10-5-2-1-0.5 m, certified
  Critical Dimension (CD) Calibration Test Specimens
  Art.
  no. 618-7 to 618-7R

  Description

  for SEM, FIB, and AFM

  “Critical Dimension (CD) structures” are particularly useful for SEM / FIB magnification calibration and may be used for AFM.

  Microscopists and engineers using high performance SEMs or FIB systems will find this calibration test specimen useful. The 4.8 x 4.8mm silicon standard has a series of patterns with a side length of 480 m around its edges, helpful for orientation. There are three versions available.

  Version with a 10-5-2-1-0.5um structureThis CD calibration test specimen comprises 5 line patterns, each one clearly identified by its pitch. Each pattern has five bars and spaces of equal pitch:10.0um, 5.0 m, 2.0 m, 1.0 m and 0.5 m. The central line area may be used for AFM measurements. The patterns are etched into Si with a depth of approximately 200nm. There is no coating on the Si surface. Two types are offered: non-certified certified by PTB (Physikalische Technische Bundesanstalt – German counter part of NIST) and individually numbered.

  Based on the measurement of 9 different standards, the accuracy and uniformity are:

  Pattern Size	10 m	5 m	2 m	1 m	0.5 m
  Accuracy	0.20%	0.22%	0.35%	0.56%	0.78%
  Uniformity	0.27%	0.34%	0.53%	0.80%	1.2%

  SEM Holders

  SEM Holders

  Type	Prod. No.		Data (D=Head dia.; P=Pin dia.; PL=Pin (length)
  A	16111		Pin Mount: D=12.7mm; P=3.2mm; PL= 7.9mm, FEI/Philips, Cambridge, Leica, TESCAN, CAMSCAN, ASPEX, Phenom
  B	16261		Pin Mount: D=12.7mm; P=3.2mm; PL=14.3mm, AMRAY
  C	16221		9.5mm dia. x 9.5mm Cylinder, JEOL
  D	16281		15mm dia. x 15mm Cylinder, JEOL, ISI/ABT/TOPCON
  E	16291		15mm dia. x 10mm Cylinder, JEOL, ISI/ABT/TOPCON
  F	16111-9		Pin Mount: 12.7mm x 3.2mm pin. PL=6mm, ZEISS/LEO SEMS FESEMs/FIBS
  G			You Supply Mount or Mount of Your Choice, not listed here (contact customer service)
  K	16324		15mm dia. x 6mm Cylinder, M4 Hitachi, Agilent / Keysight
  L	16327		25mm dia. x 6mm Cylinder, M4 Hitachi, Agilent / Keysight
  M	16231		12.2mm dia. x 10mm Cylinder, JEOL
  O	16115		31.7mm dia. x 6.47mm, Cambridge S4 Mount
  P	16242		Pin Mount: 12.7mm dia. x 15.7mm height, AMRAY special slotted head
  Q	16153		25mm dia. x 10mm Cylinder, JEOL
  R	16144		Pin mount: D=25.4mm; pin=3.2mm, FEI/Philips, Cambridge, Leica, TESCAN, CAMSCAN, ASPEX, Phenom

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  Unit	Choose an optionEachClear

  CD Structure 10-5-2-1-0.5 m, certified quantity
  
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  Description
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  Product

  
  
  
  CD Structure 500-200-100nm, non-certified
  Critical Dimension (CD) Calibration Test Specimens
  Art.
  no. 618-4 to 618-4R

  Description

  (overview with location bars)

  Version with a 500-200-100nm structure (structure)

  This advanced CD calibration test specimen is suited for calibrating smaller structures. The 500-200-100nm test specimen comprises 3 line patterns, each identified by its pitch.

  Each pattern has 5 bars and spaces with equal pitch: 500nm, 200nm and 100nm. The central area may be used for AFM measurements.

  The patterns are etched into Si with a depth of approx. 45-50nm. There is no coating on the Si surface.
  On some CD calibration targets one of the 100nm lines can be missing. This is a normal occurrence and does not influence performance of the specimen.

   

  Pattern Size	500nm	200nm	100nm
  Accuracy	0.30%	0.55%	0.50%
  Uniformity	0.24%	0.60%	1.20%

   

  SEM Holders

  SEM Holders

  Type	Prod. No.		Data (D=Head dia.; P=Pin dia.; PL=Pin (length)
  A	16111		Pin Mount: D=12.7mm; P=3.2mm; PL= 7.9mm, FEI/Philips, Cambridge, Leica, TESCAN, CAMSCAN, ASPEX, Phenom
  B	16261		Pin Mount: D=12.7mm; P=3.2mm; PL=14.3mm, AMRAY
  C	16221		9.5mm dia. x 9.5mm Cylinder, JEOL
  D	16281		15mm dia. x 15mm Cylinder, JEOL, ISI/ABT/TOPCON
  E	16291		15mm dia. x 10mm Cylinder, JEOL, ISI/ABT/TOPCON
  F	16111-9		Pin Mount: 12.7mm x 3.2mm pin. PL=6mm, ZEISS/LEO SEMS FESEMs/FIBS
  G			You Supply Mount or Mount of Your Choice, not listed here (contact customer service)
  K	16324		15mm dia. x 6mm Cylinder, M4 Hitachi, Agilent / Keysight
  L	16327		25mm dia. x 6mm Cylinder, M4 Hitachi, Agilent / Keysight
  M	16231		12.2mm dia. x 10mm Cylinder, JEOL
  O	16115		31.7mm dia. x 6.47mm, Cambridge S4 Mount
  P	16242		Pin Mount: 12.7mm dia. x 15.7mm height, AMRAY special slotted head
  Q	16153		25mm dia. x 10mm Cylinder, JEOL
  R	16144		Pin mount: D=25.4mm; pin=3.2mm, FEI/Philips, Cambridge, Leica, TESCAN, CAMSCAN, ASPEX, Phenom

  Order

  Unit	Choose an optionEachClear

  CD Structure 500-200-100nm, non-certified quantity
  
  Add to basket