Products

Scintillators

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Scintillators for SEM, FESEM, and Microprobes
Planotec P47, YAP, YAG.

Planotec P47 Scintillator Discs

The Planotec P47 Scintillator Discs are coated with a highly uniform layer of carefully selected and graded P47 phosphor to provide a high signal output and exhibit excellent working life.
They are considered best quality scintillator discs and are used by several SEM manufacturers.

The Planotec P47 Scintillators are engineered to give the best S/N ratio and imaging quality with a delay time of 80 nano seconds. For best signal intensity they are not coated. They are available for virtually all SEM models, see the list with the ordering information.
Since the constant bombardment with accelerated electrons and the constant ionization of the layer will slowly deteriorate the P47 layer is recommended to replace the scintillator disc at regular intervals to maintain high image quality.

Contamination of the P47, caused by hydrocarbon deposited on the scintillator surface, will also decrease the signal. Since signal decrease mostly occurs at a slow rate it is not readily noticeable from one day to the other, but when a new scintillator is installed, most operators will notice a dramatic improvement of image quality.

Our recommendation is to renew scintillator discs every 6 months on regularly used systems and yearly at systems with low use.
They are not recommended where light leakage, vacuum sealing or backstreaming might be a problem.

YAP Single Crystal Scintillator Discs

Yttrium Aluminum Perovskite, CE doped

YAP crystals are a single crystal, glass-like material and are more efficient in light output than YAG (see graph).

The emission spectrum peaks at about 378nm (same blue as p47), corresponding reasonably closely to the maximum sensitivity of the S11 photo multiplier (commonly used in SEM’s).
In such microscopes there would be a significant improvement in signal by using a YAP crystal rather than YAG.

Decay time of YAP is 40ns compared to YAG of 60ns, so that overall performance is superior to YAG, for SEM applications. Improved signal to noise ratio (S/N) especially at high magnifications. Very long lifetime.

Can be cleaned (polished) and recoated. Best to coat with 50nm Al to avoid light sensitivity.

YAG Single Crystal Scintillator Discs

Yttrium Aluminum Garnet, CE doped

Does not degrade when bombarded by electrons or ions, thus making YAG suitable for high current operations.
Very long lifetime. Light emission peaks at about 560nm (yellow) which means that an S20 photomultiplier is most suitable for detecting the emission.

Response is better for YAG than for Planotec P47 discs below 5kV and again at higher accelerating voltages over 100kV, where the performance of powder scintillators falls off while YAG response increases linearly.
Although the signal from YAG and YAP is less than the P47, the S/N ratio is better and therefore the final signal is better.

Decay time approx. 60 nanoseconds. The side towards the light guide is micro-textured to increase light emission.

Can be cleaned (polished) and recoated.
Best to coat with 50nm Al to avoid light sensitivity.


The YAP or YAG crystal should be coated with 50nm of aluminum before use to prevent light sensitivity. The matt textured surface is mounted in contact with the light pipe for improved light emission. See Scintillator Selection Guide for size and ordering information below for pricing.

Scintillator Selection Guide

Scintillator Selection Guide

Diameter x Thickness SEM Type
8.8 x 2mm JEOL JSM T20, T200, T300, 35CF, 800 series
9.0 x 3mm ETEC, Cambridge
10.0 x 1mm Cambridge except S600, Amray 1200, Leica, LEO, Hitachi upper stage, JEOL JSM 35/50A
12.0 x 1mm Nanolab D2000/D3000, Cambridge S600/S604
12.0 x 0.17mm Zeiss SEM, ZEISS/LEO FESEM
12.4 x 3.2mm Cameca
13.7 x 1mm ISI except MiniSEM, JEOL w. TEM module
18.0 x 1mm CamScan, Balscan, Cambridge S-4
19.8 x 1mm Hitachi with metal ring
20.0 x 1mm JEOL early series, older Hitachi, Amray except 1200, Electroscan
20.0 x 2mm FEI/Philips


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P47 Scintillator Discs, Uncoated
Scintillators for SEM, FESEM, and Microprobes Planotec P47, YAP, YAG.

no. 16906 to 16920

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YAP Scintillator Disc, uncoated

no. 16972 to 16996

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YAG Scintillator Disc, uncoated
Uncoated YAG Single Crystal Scintillator Discs

no. 16930 to 16943

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YAP Scintillator Disc, coated with 50nm Aluminum

no. 16972-AL to 16996-AL

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YAG Scintillator Disc, coated with 50nm Aluminum
YAG Single Crystal Scintillator Discs, Coated with 50nm Aluminum

no. 16930-AL to 16943-AL

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