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Modular Sputter Coater

CCU-010 COMPACT COATING UNIT compact – modular – innovative

Two models
The CCU-010 coating unit is available in two versions. CCU-010 LV for finevacuum applications and CCU-010 HV for high-vacuum applications. The modular concept makes it easy to convert the unit from a pre-vacuum unit into a high-vacuum unit later on.

A smart device
Whether you wish to sputter, vaporise or apply plasma treatment to carbon – you can configure the device for each of these applications by simply changing the process head.

No unnecessary downtimeThe device is ready to operate almost immediately. The use of high-quality materials and components in combination with innovative ideas results in extraordinarily short process times. The automatic mode allows for reliable and consistent thin coatings.

Compact and practical
Save valuable space thanks to small dimensions. Weight has been reduced to a minimum. Thanks to the consistent use of standardised vacuum-connection flanges, the unit also works with third-party devices.

Easy start-up and servicing
Unpack, connect, start! Do away with high start-up costs. The plug-and-play concept allows you to start up the device by yourself. You only need to connect the power supply and process gas. Thanks to the integrated USB service interface, a service technician can run a quick error analysis on site or remotely via an Internet connection. The modular set-up allows defective components to be replaced in a targeted manner.


Technical data
Dimensions (depth x width x height) 57 x 36 x 35 cm
Weight 26 kg
Power supply 90 to 260 VAC; 50/60 Hz
Power consumption max. 6 A
Power requirement max. 500 W
Noise level max. 40 dB(A)






CCU-010 modular sputter coater

Highlights and features
  • Sputtering, vaporising of carbon thread and plasma treatment (hydrophilic/hydrophobic) with one single device.
  • Use of targets with a diameter of 54 mm and a thickness of up to 3 mm, which can be changed quickly and easily.
  • Long live targets
  • The magnetron sputter head allows for fine-grained sputtering for high-resolution FESEM applications.
  • Sputtering of indium tin oxide (ITO) and carbon possible.
  • Glass reaction cylinder Ø120mm (DIN 100 ISO-KF compatible) with implosion guard and safety monitoring.
  • Automatic target shutter
  • Electronically regulated process vacuum with Pirani and cold cathode measuring system
  • Automatic valve control for two process gases and venting
  • Target cooling with temperature monitoring
  • Round stage, height-adjustable and tiltable (Ø80mm) to hold your samples. The table can be easily removed without tools for cleaning purposes (sandblasting).
  • Speed-controlled rotary or planetary gear table with a range of options for holding samples
  • Film-thickness measurement via double-quartz measuring system (for small samples at the centre, for large samples at the edge)
  • Integrated ‘MD 1 Vario-SP’ membrane pump (HV version)
  • Integrated ‘Hi Pace 80’ turbo pump (HV version)
  • Wide-range power supply (90VAC to 260VAC)
  • 5.7’’ TFT-Touch graphical display
  • Intuitive user software with many useful features
  • Easy creation of coating recipes, which guarantee reproducible results
  • Storage/view of the last ten processes
  • Graphical representation of process data with Windows-based software Coating LAB.
  • Feature for automatically venting the system in the event of power loss. This prevents the system from getting contaminated by backing pump oil (LV version).
  • USB interface for easy process analysis and software update
  • Uniform interface for different process heads
  • Automatic process head recognition
  • 6mm Legris connections for two process gases and a venting gas
  • Flange connection (DN 25 ISO-KF) for connecting an external backing pump (LV version)
  • Can be used as a pure pumping unit
  • Small size and low weight
  • Swiss quality


The SP-010 sputtering module for the CCU-010 LV and CCU-010 HV Compact Coating Units has a small form factor, yet offers all the features required for highquality sputter coating in a vacuum.
The module fully integrates a magnetron, target, shutter, process pressure regulator and power electronics in a unique, robust unit that is guaranteed to be ready for operation and easy to maintain.
An innovative interface with power and gas supply as well as signal transmission allows the modular system to be configured to work as a sputtering unit with just a single hand movement.


  • Electronically controlled process vacuum ensures stable pressure in the receptacle.
  • Circular gas orifice ensures homogeneous process gas distribution.
  • Detection and monitoring of splinter protection guarantees safe operation.
  • Target cooling with temperature monitoring ensures smooth operation.
  • Uniform electrical and pneumatic interface for use with basic units CCU-010 HV and CCU-010 LV.

CCU-010 sputter head shutter open




As a small, compact module, the CT-010 carbon yarn head has all the technical characteristics required for reproducible vaporisations and subsequent surface modifications.
A newly developed automatic carbon yarn tracking system enables the unit to generate up to 50 carbon films without the user having to adjust the carbon yarn vaporiser.
A high-performance combination of carbon coating and subsequent glow discharge treatment without interrupting the vacuum conditions ensures exceptionally efficient generation of hydrophilic carbon-carrying films.


  • An innovative, automatic tracking system (patent pending) manages up to 2m of carbon yarn, which is deployed using a spool.
  • Pulsed electrical surges in ‘regular’ and ‘gentle’ mode meet every need, from rapid coating processes through to high-precision carbon coatings that are exceptionally easy on the samples.
  • A process gas controller delivers the air for the glow discharge precisely on the surface of the substrate.
  • Precise control of plasma output allows for a broad range of applications for modifying the surface properties of samples.
  • Uniform electrical and pneumatic interface for use with basic units CCU-010 HV







An integrated plug connection for the motor and layer thickness sensor allows the sample table to be exchanged in seconds.

Universal, smooth adjustment of table height, tilt angle and rotational speed guarantee exceptionally homogenous films even on very jagged samples.

Samples can be arranged optimally on the table thanks to the intelligent layout of mounting holes for SEM stubs.

Compact pancake design enables handy preparation and sample transport with a height of just 23 mm with an 80 mm diameter.



This Windows-based software is easy to install on your laptop and offers diverse options for monitoring and documenting processes.

Fully automatic logs with selectable charts containing all process-related data can be exported as screenshots or CSV files for your Office applications.

Other outstanding features include parameter management, intuitive software upgrades and where-used lists for the system.


  • Auto-connect functionality automatically connects the laptop and coating unit via a USB interface.
  • The last 10 processes executed by the unit are stored and depicted in the history function.
  • The pressure, current and voltage for the process are displayed along with the film thickness and coating rate.
  • An extensive parameter database enables users to tailor the system to fit the application environment like a glove.
  • With an Internet connection, Coating-LAB can easily establish remote access for error diagnosis and process optimisation.